Inna Skvortsova

The conference examines market and technology trends in bulk, rare, and specialty gases used in electronics, for executives, buyers, product managers, and strategic planners across the electronic-gases value chain. Sessions address U.S. semiconductor public policy, CHIPS metrology, gas-system challenges as Moore’s Law advances, vapor-phase materials, large-grain molybdenum deposition, solid precursor delivery, and tungsten powder supply-chain issues. A low-GWP adoption session discusses fab direct emissions, coordinated gas substitution, and industry-wide collaboration. Other technical topics include contamination control and yield, hydrogen-halide contamination, deuterium supply and purity, isotropic dry-cleaning technology, zero-nuclear-spin isotopes for semiconductor fabs and quantum computing, and new etch gases. The program also covers gas-delivery sealing, contamination and reliability tradeoffs; AI applications in automated gas handling; EUV tool gas purification; High NA EUV lithography infrastructure; sub-fab roadmaps and collaboration; precursor delivery and control; abatement; and emissions monitoring. Metrology sessions address MoCl5 stability and impurity measurements in electronic-grade rare gases and ultra-high-purity gases. Market sessions examine the global economy and semiconductors, fab capacity and equipment, helium, and specialty gases.