ESGS 2026—Electronic Specialty Gases & Systems Conference
Date
November 10
Format
In-Person
Location
Phoenix, AZ
Price
Member: $1,555; non-member: $1,865.
Importance:
About
The conference examines market and technology trends in bulk, rare, and specialty gases used in electronics, for executives, buyers, product managers, and strategic planners across the electronic-gases value chain. Sessions address U.S. semiconductor public policy, CHIPS metrology, gas-system challenges as Moore’s Law advances, vapor-phase materials, large-grain molybdenum deposition, solid precursor delivery, and tungsten powder supply-chain issues. A low-GWP adoption session discusses fab direct emissions, coordinated gas substitution, and industry-wide collaboration. Other technical topics include contamination control and yield, hydrogen-halide contamination, deuterium supply and purity, isotropic dry-cleaning technology, zero-nuclear-spin isotopes for semiconductor fabs and quantum computing, and new etch gases. The program also covers gas-delivery sealing, contamination and reliability tradeoffs; AI applications in automated gas handling; EUV tool gas purification; High NA EUV lithography infrastructure; sub-fab roadmaps and collaboration; precursor delivery and control; abatement; and emissions monitoring. Metrology sessions address MoCl5 stability and impurity measurements in electronic-grade rare gases and ultra-high-purity gases. Market sessions examine the global economy and semiconductors, fab capacity and equipment, helium, and specialty gases.
Schedule
Times are local to the event.
8:00 AM – 8:05 AM
Opening Day Remarks
8:05 AM – 8:45 AM
KEYNOTE—From AI to Atoms: How the Next Semiconductor Wave Will Reshape Electronic Gases
Keynote
8:45 AM – 9:15 AM
Breaking the Commercial Deadlock: Industry-Led Strategies for Low-GWP Adoption
9:15 AM – 9:45 AM
U.S. Semiconductor Public Policy Update
9:45 AM – 10:15 AM
Measuring the Future: CHIPS Metrology Program Updates
11:00 AM – 11:30 AM
Gas Systems Challenges as Moore’s Law Advances
11:30 AM – 12:00 PM
Title not listed
1:15 PM – 1:20 PM
Opening Session Remarks
1:20 PM – 1:50 PM
Large Grain Molybdenum Deposition
1:50 PM – 2:20 PM
Solid Precursor Delivery: Challenges and Solutions
2:20 PM – 2:50 PM
Tungsten Powder Supply Chain Issues & Impacts
3:35 PM – 3:40 PM
Opening Session Remarks
3:40 PM – 4:10 PM
IRDS YE WECC Gas Team Update 2026
Annual update on gas-purity and CVD/ALD precursor-contamination challenges, risk assessment, and metrology needs.
4:10 PM – 4:40 PM
Defining and Solving Contamination Challenges of Hydrogen Halides
4:40 PM – 5:10 PM
Deuterium Supply Chain & Purity Considerations
5:10 PM – 5:20 PM
Closing Remarks
Speakers(41)
Managing Partner, Linx Consulting
Strategic Partnerships, Google
Research Chemical Engineer, NIST
PTD Gas Systems Engineer, Intel
Vice President, R&D and Engineering, Entegris
Deputy CTO & Technology Director, Thin Film Processing, Air Liquide
Staff Process Engineer, Lam Research
Senior R&D Manager, Air Liquide Advanced Materials
VP, Specialty Gases, EMD Electronics
Director, E/R&D Gas Purification, Entegris
Supply Chain Engineer, Intel
Senior Microcontamination Engineer, Intel
Senior Research & Development Manager, Entegris
Partner, McKinsey & Company
Linde
Staff Engineer, Samsung Electronics
Vice President Business Development, Electronics, ASP Isotopes
Principal Scientist, EMD Electronics
Senior Engineer, Qnity Electronics
Principal Chemical Engineer, Micron
Senior Sales Engineer, Wonik Holdings USA
Director of R&D, Gas Analysis, Nippon Sanso Matheson
Director, Technical Programs North America, Edwards Vacuum
Director of Environmental, Health, and Safety, NY Creates
Sr. Applications Specialist, Ceres Technologies
Consortium Manager, SCC, SEMI
Environment and Sustainability Manager, Edwards Vacuum
Business Manager, Onterris
Senior Director, Yield Strategy, Intel
Product Manager, Process Insights
Senior Applications Specialist, Thermo Fisher Scientific
Managing Partner, Linx Consulting
Chief Economist and Founder, Hilltop Economics
Research Manager, Market Intelligence, SEMI
Founder & President, Kornbluth Helium Consulting
Managing Director, Asia, Linx Consulting
Sales Manager, Isowater Corporation
Program Manager, Linde
CEO, ISRL
President, SEMI Americas
CTO, ISRL
Funding programs
Find open federal and state grants, loans, tax credits and other programs relevant to this event and the people you'll meet there, including programs in other states if you're weighing where to build.
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