ESGS 2026—Electronic Specialty Gases & Systems Conference

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Date

November 10

Format

In-Person

Location

Phoenix, AZ

Price

$1,555 – $1,865

Member: $1,555; non-member: $1,865.

Critical Materials
Technology
Science
Economics

Importance:

Notable

About

The conference examines market and technology trends in bulk, rare, and specialty gases used in electronics, for executives, buyers, product managers, and strategic planners across the electronic-gases value chain. Sessions address U.S. semiconductor public policy, CHIPS metrology, gas-system challenges as Moore’s Law advances, vapor-phase materials, large-grain molybdenum deposition, solid precursor delivery, and tungsten powder supply-chain issues. A low-GWP adoption session discusses fab direct emissions, coordinated gas substitution, and industry-wide collaboration. Other technical topics include contamination control and yield, hydrogen-halide contamination, deuterium supply and purity, isotropic dry-cleaning technology, zero-nuclear-spin isotopes for semiconductor fabs and quantum computing, and new etch gases. The program also covers gas-delivery sealing, contamination and reliability tradeoffs; AI applications in automated gas handling; EUV tool gas purification; High NA EUV lithography infrastructure; sub-fab roadmaps and collaboration; precursor delivery and control; abatement; and emissions monitoring. Metrology sessions address MoCl5 stability and impurity measurements in electronic-grade rare gases and ultra-high-purity gases. Market sessions examine the global economy and semiconductors, fab capacity and equipment, helium, and specialty gases.

Schedule

Times are local to the event.

8:00 AM – 8:05 AM

Opening Day Remarks

Mike Corbett

8:05 AM – 8:45 AM

KEYNOTE—From AI to Atoms: How the Next Semiconductor Wave Will Reshape Electronic Gases

Keynote

Guttorm Aase

8:45 AM – 9:15 AM

Breaking the Commercial Deadlock: Industry-Led Strategies for Low-GWP Adoption

Bruce Gall

9:15 AM – 9:45 AM

U.S. Semiconductor Public Policy Update

9:45 AM – 10:15 AM

Measuring the Future: CHIPS Metrology Program Updates

Berc Kalanyan

11:00 AM – 11:30 AM

Gas Systems Challenges as Moore’s Law Advances

Gustavo Albuquerque

11:30 AM – 12:00 PM

Title not listed

Mark O'Neill

1:15 PM – 1:20 PM

Opening Session Remarks

Venkat Pallam

1:20 PM – 1:50 PM

Large Grain Molybdenum Deposition

David Mandia, PhD

1:50 PM – 2:20 PM

Solid Precursor Delivery: Challenges and Solutions

Feng Li

2:20 PM – 2:50 PM

Tungsten Powder Supply Chain Issues & Impacts

Rachel Potter

3:35 PM – 3:40 PM

Opening Session Remarks

Sarah Vogt

3:40 PM – 4:10 PM

IRDS YE WECC Gas Team Update 2026

Annual update on gas-purity and CVD/ALD precursor-contamination challenges, risk assessment, and metrology needs.

Vindhya Kunduru, Latif Ahmed

4:10 PM – 4:40 PM

Defining and Solving Contamination Challenges of Hydrogen Halides

Rocky Gibson, PhD

4:40 PM – 5:10 PM

Deuterium Supply Chain & Purity Considerations

Steve Bovair

5:10 PM – 5:20 PM

Closing Remarks

Mike Corbett

Speakers(41)

Mike Corbett

Managing Partner, Linx Consulting

Bruce Gall

Strategic Partnerships, Google

Berc Kalanyan

Research Chemical Engineer, NIST

Gustavo Albuquerque

PTD Gas Systems Engineer, Intel

Mark O'Neill

Vice President, R&D and Engineering, Entegris

Venkat Pallam

Deputy CTO & Technology Director, Thin Film Processing, Air Liquide

David Mandia, PhD

Staff Process Engineer, Lam Research

Feng Li

Senior R&D Manager, Air Liquide Advanced Materials

Rachel Potter

VP, Specialty Gases, EMD Electronics

Sarah Vogt

Director, E/R&D Gas Purification, Entegris

Vindhya Kunduru

Supply Chain Engineer, Intel

Latif Ahmed

Senior Microcontamination Engineer, Intel

Rocky Gibson, PhD

Senior Research & Development Manager, Entegris

Guttorm Aase

Partner, McKinsey & Company

Heejeong Kim

Staff Engineer, Samsung Electronics

Natalie Grancharov Camacho

Vice President Business Development, Electronics, ASP Isotopes

Elizaveta Kossoy

Principal Scientist, EMD Electronics

Calvin Chen

Senior Engineer, Qnity Electronics

Jake Armstrong

Principal Chemical Engineer, Micron

Johnathen Graham

Senior Sales Engineer, Wonik Holdings USA

Kris Chupka

Director of R&D, Gas Analysis, Nippon Sanso Matheson

Kurtis Fairley

Director, Technical Programs North America, Edwards Vacuum

Kassey Rydberg

Director of Environmental, Health, and Safety, NY Creates

Kim Fjeldsted

Sr. Applications Specialist, Ceres Technologies

Peilun Sun

Consortium Manager, SCC, SEMI

Chris Jones

Environment and Sustainability Manager, Edwards Vacuum

Blake Ericson

Business Manager, Onterris

Nithin Yathapu

Senior Director, Yield Strategy, Intel

Chad Nelson

Product Manager, Process Insights

Tony Kou

Senior Applications Specialist, Thermo Fisher Scientific

Mark Thirsk

Managing Partner, Linx Consulting

Duncan Meldrum

Chief Economist and Founder, Hilltop Economics

Inna Skvortsova

Research Manager, Market Intelligence, SEMI

Phil Kornbluth

Founder & President, Kornbluth Helium Consulting

Andy Tuan

Managing Director, Asia, Linx Consulting

Steve Bovair

Sales Manager, Isowater Corporation

Jared Piette

Program Manager, Linde

Joe Stockunas

President, SEMI Americas

Funding programs

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