SEMI Liquid Chemicals Analytical Forum
Date
October 14
Time
8:30 AM PT
Format
Hybrid
Location
San Francisco, CA
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About
The forum focuses on analytical methods and instrumentation for near-term particle metrology challenges identified in the 2024 IRDS Roadmap, including slurry particle characterization, liquid-chemical particles below critical size, CMP slurry large-particle measurement, post-CMP cleaning particles, and particle precursors below 10 nm. Presentations cover particle-size distribution in CMP slurries; dynamic image analysis and machine learning for large-particle metrology; sub-10 nm nanoparticle characterization; online measurement of 5 nm metallic nanoparticles; aerosolization-based metrology; liquid contamination and on-wafer defectivity; direct nanoparticle analysis on 300 mm silicon wafers; and LA-ICPMS and LIBS for detecting nanoparticles and contaminants in silicon and silicon carbide wafers. Named presenters include Paul Trio, Director, Standards, SEMI; Suhas Ketkar, Elemental Scientific; Juan Atkinson Mora, Carl ZEISS; Tyler Roberts, Shimadzu Scientific Instruments; Lisa Mey-Ami, Air Liquide Balazs; Hwan Kim, Principal Scientist, Elemental Scientific; Shane Hale, Kanomax FMT; Dr. Marie Tripp, VP, North America and Explorer Product Manager, UNISERS AG; Haruka Nishikawa, Rorze Automation Inc.; and Derrick Quarles, Elemental Scientific.
Speakers(10)
Director, Standards, SEMI
Elemental Scientific
Carl ZEISS
Shimadzu Scientific Instruments
Air Liquide Balazs
Principal Scientist, Elemental Scientific
Kanomax FMT
VP, North America and Explorer Product Manager, UNISERS AG
Rorze Automation Inc.
Elemental Scientific
Topics
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